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Semiconductor Optoelectronics, Volume. 43, Issue 4, 752(2022)

Chromatic Confocal Microscopy Measurement Technique: A Review

WANG Zi1...2, SHI Junkai1,*, CHEN Xiaomei1, JIANG Xingjian1, LI Guannan1, HUO Shuchun1, GAO Chao1,2, ZHU Qiang1,2, and ZHOU Weihu12 |Show fewer author(s)
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    WANG Zi, SHI Junkai, CHEN Xiaomei, JIANG Xingjian, LI Guannan, HUO Shuchun, GAO Chao, ZHU Qiang, ZHOU Weihu. Chromatic Confocal Microscopy Measurement Technique: A Review[J]. Semiconductor Optoelectronics, 2022, 43(4): 752

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    Received: Feb. 16, 2022

    Accepted: --

    Published Online: Oct. 16, 2022

    The Author Email: Junkai SHI (shijunkai@ime.ac.cn)

    DOI:10.16818/j.issn1001-5868.2022021601

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology