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Semiconductor Optoelectronics, Volume. 43, Issue 6, 1040(2022)

Advances in the Research on MOEMS Gas Sensing Technology

CAI Weiming1... REN Qingying1,2, JIANG Yanhu1, WEI Hongfei1, PENG Junyue1, CHANG Chunyun2, and XUE Mei12 |Show fewer author(s)
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    CAI Weiming, REN Qingying, JIANG Yanhu, WEI Hongfei, PENG Junyue, CHANG Chunyun, XUE Mei. Advances in the Research on MOEMS Gas Sensing Technology[J]. Semiconductor Optoelectronics, 2022, 43(6): 1040

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    Special Issue:

    Received: Nov. 19, 2022

    Accepted: --

    Published Online: Jan. 27, 2023

    The Author Email:

    DOI:10.16818/j.issn1001-5868.2022111903

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology