Acta Optica Sinica, Volume. 40, Issue 1, 111010(2020)

Phase Imaging Based on Ptychography and Progress on Related Key Techniques

Pan Xingchen1,2、*, Liu Cheng1,2, Tao Hua1,2, Liu Haigang3, and Zhu Jianqiang1,2
Author Affiliations
  • 1Key Laboratory of High Power Laser and Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2National Laboratory on High Power Laser and Physics, China Academy of Engineering Physics, Chinese Academy of Sciences, Shanghai 201800, China
  • 3Shanghai Synchrotron Radiation Facility, Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201204, China
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    Ptychography is a newly developed phase-retrieval technique based on lighting-probe scanning of a specimen in which the scanning step is smaller than the probe diameter. By using an iterative calculation, the complex-amplitude distributions of the probe and the specimen could be reconstructed simultaneously. Ptychography is a non-lens phase imaging technique with theoretically diffraction-limited resolution. Initially, the performance of Ptychography is limited by its basic assumptions. With the development of related researches in recent years, its characteristics have been gradually understood, and it has become increasingly mature as well. Nowadays, Ptychography has been applied to phase imaging, wavefront diagnostics, and optical metrology in the fields of visible, X-ray, and electrons. This paper discusses key factors that affect the reconstruction process and accuracy, including multiple modes, scanning errors, light-spot errors, distance errors, and non-negligible specimen thickness, and summarizes a development of key techniques to help overcome these factors.

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    Pan Xingchen, Liu Cheng, Tao Hua, Liu Haigang, Zhu Jianqiang. Phase Imaging Based on Ptychography and Progress on Related Key Techniques[J]. Acta Optica Sinica, 2020, 40(1): 111010

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    Paper Information

    Special Issue:

    Received: Sep. 30, 2019

    Accepted: --

    Published Online: Jan. 6, 2020

    The Author Email: Xingchen Pan (xchpan@siom.ac.cn)

    DOI:10.3788/AOS202040.0111010

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