Optics and Precision Engineering, Volume. 19, Issue 2, 332(2011)

Seed beam smoothing for high power XeCl excimer laser system

XUE Quan-xi*... ZHAO Xue-qing, HUA Heng-qi, ZHENG Guo-xin and ZHANG Yong-sheng |Show fewer author(s)
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    XUE Quan-xi, ZHAO Xue-qing, HUA Heng-qi, ZHENG Guo-xin, ZHANG Yong-sheng. Seed beam smoothing for high power XeCl excimer laser system[J]. Optics and Precision Engineering, 2011, 19(2): 332

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    Paper Information

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    Received: Oct. 8, 2010

    Accepted: --

    Published Online: Mar. 30, 2011

    The Author Email: Quan-xi XUE (quanxixue@163.com)

    DOI:

    CSTR:32186.14.

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