Optics and Precision Engineering, Volume. 19, Issue 2, 332(2011)
Seed beam smoothing for high power XeCl excimer laser system
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XUE Quan-xi, ZHAO Xue-qing, HUA Heng-qi, ZHENG Guo-xin, ZHANG Yong-sheng. Seed beam smoothing for high power XeCl excimer laser system[J]. Optics and Precision Engineering, 2011, 19(2): 332
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Received: Oct. 8, 2010
Accepted: --
Published Online: Mar. 30, 2011
The Author Email: Quan-xi XUE (quanxixue@163.com)
CSTR:32186.14.
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