The seed beam smoothing experiments were performed to get a smoothing and partial coherence seed by using Amplified Spontaneous Emission(ASE) and scattering methods. The relationship between the uniformity of seed beam intensity distribution,energy,the divergence of seed beam and the beam diameter and postion was investigated based on a short pulse XeCl excimer laser.And then the factors which infulenced the parameters of the seed beam were analysed. Experimental results indicate that the lowest nonuniformity of the seed beam produced by ASE method is 2.01%, and the energy is several μJ. But the horizontal divergence of the seed beam is different from the vertical one. The nonuniformity of the seed beam produced by scattering method is 1.54%, the energy is about one hundred nJ as the divergence is 5.5 mrad, and the laser beam diffraction limited times can be adjusted from 14 to 37. Furthermore,the size of the pumping source influences the divergence of the seed produced by ASE, and the input laser energy, laser diameter on scattering board and the focus of the lens for gathering light influence the parameters of scattering seed. After being amplified, the nonuniformity of the source beam is 2.04%, and the energy is about 8.0 mJ. The results mentioned above show that the seed adapts to the high power XeCl excimer laser system.