Optics and Precision Engineering, Volume. 32, Issue 13, 2061(2024)

Design and experiment of micro-arrayed beam blanker

Lixin ZHANG1... Botong SUN1, Xingyun LIU1,2, Bohua YIN1,2,*, Junbiao LIU1,2, and Li HAN12 |Show fewer author(s)
Author Affiliations
  • 1Research Department of Micro-nano Fabrication Technology and Intelligent Electronic Devices, Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing0090, China
  • 2School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing100049, China
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    CLP Journals

    [1] Weixia ZHAO, Lingchao BAI, Lixin ZHANG, Junbiao LIU, Bohua YIN, Li HAN. Design and experiment of multi-beam electron source[J]. Optics and Precision Engineering, 2025, 33(5): 741

    [2] Weixia ZHAO, Lingchao BAI, Lixin ZHANG, Junbiao LIU, Bohua YIN, Li HAN. Design and experiment of multi-beam electron source[J]. Optics and Precision Engineering, 2025, 33(5): 741

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    Lixin ZHANG, Botong SUN, Xingyun LIU, Bohua YIN, Junbiao LIU, Li HAN. Design and experiment of micro-arrayed beam blanker[J]. Optics and Precision Engineering, 2024, 32(13): 2061

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    Paper Information

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    Received: Apr. 9, 2024

    Accepted: --

    Published Online: Aug. 28, 2024

    The Author Email: YIN Bohua (yinbh@mail.iee.ac.cn)

    DOI:10.37188/OPE.20243213.2061

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