Design and experiment of micro-arrayed beam blanker

Lixin ZHANG; Botong SUN; Xingyun LIU; Bohua YIN; Junbiao LIU; Li HAN

doi:10.37188/OPE.20243213.2061

Optics and Precision Engineering, Volume. 32, Issue 13, 2061(2024)

Design and experiment of micro-arrayed beam blanker

Lixin ZHANG1... Botong SUN1, Xingyun LIU1,2, Bohua YIN1,2,*, Junbiao LIU1,2, and Li HAN12 |Show fewer author(s)

¹Research Department of Micro-nano Fabrication Technology and Intelligent Electronic Devices， Institute of Electrical Engineering， Chinese Academy of Sciences， Beijing0090， China

²School of Electronic， Electrical and Communication Engineering， University of Chinese Academy of Sciences， Beijing100049， China

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Fig. 1. Schematic drawing of multi-beam electron optical system

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Fig. 2. Working principle of arrayed beam blanker

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Fig. 3. Design of micro-arrayed beam blanker

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Fig. 4. Critical dimensions of arrayed beam blanker

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Fig. 5. Fabrication flow chart of arrayed beam blanker

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Fig. 6. Image of fabricated arrayed beam blanker

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Fig. 7. Physical map of assembled beam blanker

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Fig. 8. Controller design scheme of beam blanker

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Fig. 9. Physical map of arrayed beam blanker controller

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Fig. 10. Numbering of arrayed beam blanker

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Fig. 11. Multi-beam electron beam test bench

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Fig. 12. Experimental results of electron beam deflection by 3×3 arrayed beam blanker

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Fig. 13. Comparison of deviation calculation of arrayed beam blanker

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Table 1. Experimental results of rise and fall time of arrayed beam blanker
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Table 1. Experimental results of rise and fall time of arrayed beam blanker
束闸编号
上升时间
/ns
下降时间
/ns
偏转速度（按上升时间计算）/MHz
1 36 54 27.8
2 30.2 43.6 33.1
3 33.7 55.8 29.7
4 29.7 47.6 33.7
5 23 47.4 43.5
6 32 47.4 31.3
7 26.6 55.9 37.6
8 31.9 55 31.4
9 34.6 50.7 28.9

Table 2. Calculation result of deflection distance of arrayed beam blanker

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Table 2. Calculation result of deflection distance of arrayed beam blanker

束闸编号	1-2间距	2-3间距	4-5间距	5-6间距	7-8间距	8-9间距
初始位置	132.94	133.98	133.84	130.67	131.57	130.08
1号偏转	107.03	135.57	133.83	131.63	130.76	131.24
2号偏转	163.79	108.09	134.37	130.26	131.05	131.69
3号偏转	131.19	161.84	134.02	131.79	130.05	132.10
4号偏转	129.63	132.79	105.70	132.43	129.51	130.96
5号偏转	133.40	131.62	163.45	102.99	130.24	130.73
6号偏转	132.50	135.20	133.58	160.36	129.40	132.04
7号偏转	133.14	134.14	133.76	129.52	104.75	132.48
8号偏转	132.69	134.43	134.08	130.38	154.13	107.91
9号偏转	132.95	135.07	133.64	130.93	130.75	160.79

Table 3. Deviation calculation result of deflection distance of arrayed beam blanker

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Table 3. Deviation calculation result of deflection distance of arrayed beam blanker

束闸编号	1-2间距	2-3间距	4-5间距	5-6间距	7-8间距	8-9间距
1号偏转	-25.91	1.60	-0.02	0.95	-0.82	1.16
2号偏转	30.85	-25.89	0.53	-0.42	-0.53	1.61
3号偏转	-1.75	27.87	0.18	1.11	-1.53	2.03
4号偏转	-3.31	-1.19	-28.15	1.75	-2.06	0.88
5号偏转	0.46	-2.36	29.60	-27.68	-1.34	0.65
6号偏转	-0.45	1.22	-0.26	29.69	-2.17	1.97
7号偏转	0.20	0.17	-0.08	-1.16	-26.82	2.40
8号偏转	-0.25	0.45	0.23	-0.29	22.55	-22.17
9号偏转	0.01	1.09	-0.20	0.26	-0.82	30.72

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Lixin ZHANG, Botong SUN, Xingyun LIU, Bohua YIN, Junbiao LIU, Li HAN. Design and experiment of micro-arrayed beam blanker[J]. Optics and Precision Engineering, 2024, 32(13): 2061

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