Microelectronics, Volume. 54, Issue 2, 293(2024)

Breakdown Simulation Analysis of Asymmetric Resistive Field Plate Field Effect Devices

YAO Chuanjian1...2, XIAO Tian1, LI Xiaoquan1, HE Yue1,2, and TAN Kaizhou12 |Show fewer author(s)
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less

    Using TCAD simulation to study the physical model and optimal structure of a two-dimensional tightly coupled resistance field plate current modulation principle.By optimizing key process and material parameters, the peak electric field in the drift region of the device was improved. Finally, under the same drift region doping, the breakdown voltage increased by 273% compared to the theoretical breakdown voltage of a one-dimensional PN junction. Under the same normalized breakdown voltage variation range of 10%, the allowable redundancy of charge variation in the drift region was expanded by 15 times compared to the existing traditional PN superjunction.Compared to symmetric resistive field-effect devices, asymmetric optimized resistive field-effect devices can better achieve structural miniaturization and high-density design under existing processes

    Tools

    Get Citation

    Copy Citation Text

    YAO Chuanjian, XIAO Tian, LI Xiaoquan, HE Yue, TAN Kaizhou. Breakdown Simulation Analysis of Asymmetric Resistive Field Plate Field Effect Devices[J]. Microelectronics, 2024, 54(2): 293

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Jan. 23, 2024

    Accepted: --

    Published Online: Aug. 21, 2024

    The Author Email:

    DOI:10.13911/j.cnki.1004-3365.240120

    Topics