Optics and Precision Engineering, Volume. 30, Issue 16, 1968(2022)
Bionic cilia micro flow sensor and its preparation method
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Junzhong LI, Xiaobo LIAO, Shilin XU, Jian ZHUANG, Yong CAI. Bionic cilia micro flow sensor and its preparation method[J]. Optics and Precision Engineering, 2022, 30(16): 1968
Category: Micro/Nano Technology and Fine Mechanics
Received: Apr. 4, 2022
Accepted: --
Published Online: Sep. 22, 2022
The Author Email: LIAO Xiaobo (liaoxiaobo@swust.edu.cn)