Optics and Precision Engineering, Volume. 30, Issue 16, 1968(2022)

Bionic cilia micro flow sensor and its preparation method

Junzhong LI1... Xiaobo LIAO1,2,*, Shilin XU1, Jian ZHUANG2 and Yong CAI1 |Show fewer author(s)
Author Affiliations
  • 1Key Laboratory of Testing Technology for Manufacturing Process,Minsitry of Education, School of Manufacturing Science and Engineering, Southwest University of Science and Technology, Mianyang6200, China
  • 2School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an710049, China
  • show less
    References(16)

    [1] F EJEIAN, S AZADI, A RAZMJOU et al. Design and applications of MEMS flow sensors: a review. Sensors and Actuators A: Physical, 295, 483-502(2019).

    [2] S R ANTON, H A SODANO. A review of power harvesting using piezoelectric materials (2003-2006). Smart Materials and Structures, 16, R1-R21(2007).

    [3] G GAUTSCHI. Piezoelectric Sensors(2007).

    [4] [4] 4彭保进, 李连琴, 马倩倩, 等. 微纳光纤耦合应变传感器[J]. 光学 精密工程, 2021, 29(5): 958-966. doi: 10.37188/OPE.20212905.0958PENGB J, LIL Q, MAQ Q, et al. Micro-nano optical fiber coupled strain sensor[J]. Opt. Precision Eng., 2021, 29(5): 958-966.(in Chinese). doi: 10.37188/OPE.20212905.0958

    [5] B TIAN, H F LI, H YANG et al. A MEMS SOI-based piezoresistive fluid flow sensor. The Review of Scientific Instruments, 89(2018).

    [6] E KANHERE, N WANG, A G P KOTTAPALLI et al. Crocodile-inspired dome-shaped pressure receptors for passive hydrodynamic sensing. Bioinspiration & Biomimetics, 11(2016).

    [7] A G P KOTTAPALLI, M BORA, M ASADNIA et al. Nanofibril scaffold assisted MEMS artificial hydrogel neuromasts for enhanced sensitivity flow sensing. Scientific Reports, 6, 1-12(2016).

    [8] A G P KOTTAPALLI, M BORA, E KANHERE et al. Cupula-inspired hyaluronic acid-based hydrogel encapsulation to form biomimetic MEMS flow sensors. Sensors (Basel, Switzerland), 17, 1728(2017).

    [9] J ZOU, J CHEN, C LIU et al. Plastic deformation magnetic assembly (PDMA) of out-of-plane microstructures: Technology and application. Journal of Microelectromechanical Systems, 10, 302-309(2001).

    [10] B ABBASNEJAD, W THORBY, A RAZMJOU et al. MEMS piezoresistive flow sensors for sleep apnea therapy. Sensors and Actuators A: Physical, 279, 577-585(2018).

    [11] A ALFADHEL, J KOSEL. Magnetic nanocomposite cilia tactile sensor. Advanced Materials (Deerfield Beach, Fla ), 27, 7888-7892(2015).

    [12] A G P KOTTAPALLI, M ASADNIA, J MIAO et al. Touch at a distance sensing: lateral-line inspired MEMS flow sensors. Bioinspiration & Biomimetics, 9(2014).

    [13] M ASADNIA, A G P KOTTAPALLI, J MIAO et al. Artificial fish skin of self-powered micro-electromechanical systems hair cells for sensing hydrodynamic flow phenomena. Journal of the Royal Society, 12, 20150322(2015).

    [14] [14] 14张小舟, 王佩红, 刘星, 等. 电化学沉积法制备ZnO柔性纳米发电机[J]. 光学 精密工程, 2018, 26(9): 2223-2229. doi: 10.3788/ope.20182609.2222ZHANGX Z, WANGP H, LIUX, et al. Fabrication of ZnO flexible nanogenerator by electrodeposition[J]. Opt. Precision Eng., 2018, 26(9): 2223-2229.(in Chinese). doi: 10.3788/ope.20182609.2222

    [15] [15] 15庄健, 王志武, 廖晓波. 应用于高速离子电导扫描成像的双压电定位平台[J]. 光学 精密工程, 2020, 28(10): 2203-2214. doi: 10.37188/OPE.20202810.2203ZHUANGJ, WANGZ W, LIAOX B. Dual-stage piezo nanopositioner for high-speed ion conductance microscopy imaging[J]. Opt. Precision Eng., 2020, 28(10): 2203-2214.(in Chinese). doi: 10.37188/OPE.20202810.2203

    [16] [16] 16廖晓波, 庄健, 程磊, 等. 微移液管探针结构读写的环境湿度控制方法[J]. 光学 精密工程, 2021, 29(10): 2432-2443. doi: 10.37188/OPE.20212910.2432LIAOX B, ZHUANGJ, CHENGL, et al. Environmental humidity control method for structural reading and writing based on micropipette probe[J]. Opt. Precision Eng., 2021, 29(10): 2432-2443.(in Chinese). doi: 10.37188/OPE.20212910.2432

    Tools

    Get Citation

    Copy Citation Text

    Junzhong LI, Xiaobo LIAO, Shilin XU, Jian ZHUANG, Yong CAI. Bionic cilia micro flow sensor and its preparation method[J]. Optics and Precision Engineering, 2022, 30(16): 1968

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Micro/Nano Technology and Fine Mechanics

    Received: Apr. 4, 2022

    Accepted: --

    Published Online: Sep. 22, 2022

    The Author Email: LIAO Xiaobo (liaoxiaobo@swust.edu.cn)

    DOI:10.37188/OPE.20223016.1968

    Topics