Fig. 1. Principle of resistance-strain cilia flow sensor

Fig. 2. Schematic diagram of cantilever beam

Fig. 3. Simulation physical model

Fig. 4. Flow rate of micro flow sensor versus cantilever beam tip displacement under different conditions

Fig. 5. Schematic diagram of micro flow sensor fabrication

Fig. 6. SEM image of the cilia array

Fig. 7. Test platform

Fig. 8. Response of different cilia array and height sensors to flow rate

Fig. 9. Response of cilia array size to flow rate

Fig. 10. Response of cilia height to flow rate