Laser Journal, Volume. 45, Issue 3, 224(2024)
Effect of CMP process parameters on the substrate transfer of AlGaInP-based LEDs
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WANG Jiawei, XU Yingchao, YANG Kai, LU Chendong, FAN Haoshuang, LU Yi. Effect of CMP process parameters on the substrate transfer of AlGaInP-based LEDs[J]. Laser Journal, 2024, 45(3): 224
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Received: Jul. 17, 2023
Accepted: --
Published Online: Oct. 15, 2024
The Author Email: Yingchao XU (ycxu@xmut.edu.cn)
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