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Semiconductor Optoelectronics, Volume. 45, Issue 3, 434(2024)

Process of Etching Shallow Tapered-Hole Arraysin Quartz Glass

WU Liying1... LIU Dan1, QUAN Xueling1, CHENG Xiulan1, ZHANG Zhiqi2, GAO Qingxue2, FU Xuecheng1, XU Liping1, ZHANG Wenhao1 and MA Ling1 |Show fewer author(s)
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    WU Liying, LIU Dan, QUAN Xueling, CHENG Xiulan, ZHANG Zhiqi, GAO Qingxue, FU Xuecheng, XU Liping, ZHANG Wenhao, MA Ling. Process of Etching Shallow Tapered-Hole Arraysin Quartz Glass[J]. Semiconductor Optoelectronics, 2024, 45(3): 434

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    Received: Dec. 30, 2023

    Accepted: --

    Published Online: Oct. 15, 2024

    The Author Email:

    DOI:10.16818/j.issn1001-5868.2023123001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology