Acta Photonica Sinica, Volume. 52, Issue 2, 0212001(2023)

Microscopy Measurement Method of Microstructure Linewidth Based on Translation Difference

Jianqiu MA1... Zhishan GAO1,*, Qun YUAN1, Zhenyan GUO1, Yifeng SUN1, Lihua LEI2 and Lin ZHAO3 |Show fewer author(s)
Author Affiliations
  • 1School of Electronic and Optical Engineering,Nanjing University of Science and Technology,Nanjing 210094,China
  • 2Shanghai Institute of Metrology and Testing Technology,Shanghai 201203,China
  • 3The 13th Institute of China Electronics Technology Corporation,Shijiazhuang 050051,China
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    References(17)

    [1] M GAD-EL-HAK, W SEEMANN. MEMS handbook. Applied Mechanics Reviews, 55, 109(2002).

    [2] Jian LI, Hui GOU, Guorong ZHANG et al. Analysis and research of PCB line width in production process. Science and Technology & Innovation, 162-163, 167(2022).

    [3] Zhuangde JIANG, Hairong WANG, Chaohui WANG. Nanometer measurement and micro intelligent instrument. China Mechanical Engineering, 11, 248-251(2000).

    [4] Daixie CHEN, Bohua YIN, Yunsheng LIN et al. Auto leveling control technique for large-range atomic force microscope. Chinese Journal of Scientific Instrument, 32, 225-229(2011).

    [5] Kailiang QIN, Zhangfei RAO, Hongxia JIN et al. Research on CD-SEM calibration and conformance evaluation. Journal of Astronautic Metrology and Measurement, 41, 13-18(2021).

    [6] Chuanxiang YIN, Sitian GAO, Xianyun ZHAO et al. The research of micro-nano linewidth measurement technology on metrological ultraviolet microscope. Acta Metrologica Sinica, 36, 575-578(2015).

    [7] Ken WEN, Jihong ZHENG. Progresses of the imaging technology of high resolution laser confocal microscope. Applied Laser, 29, 535-539(2009).

    [8] E BAUMGART, U KUBITSCHECK. Scanned light sheet microscopy with confocal slit detection. Optics Express, 20, 21805-21814(2012).

    [9] J A CONCHELLO, E W HANSEN. Enhanced 3-D reconstruction from confocal scanning microscope images. 1: Deterministic and maximum likelihood reconstructions. Applied Optics, 29, 3795-3804(1990).

    [10] R ATTOTA, T A GERMER, R M SILVER. Through-focus scanning-optical-microscope imaging method for nanoscale dimensional analysis. Optics Letters, 33, 1990-1992(2008).

    [11] I MISUMI, S GONDA, T KUROSAWA et al. Submicrometre-pitch intercomparison between optical diffraction, scanning electron microscope and atomic force microscope. Measurement Science and Technology, 14, 2065-2074(2003).

    [12] Bangshu XIONG, Ling LEI, Jinghua XU. Image-based line width measurement system. Semiconductor Optoelectronics, 29, 945-948,952(2008).

    [13] Yao QIN, Boxiong WANG, Xiuzhi LUO. Measurement algorithm for sub-pixel line width in images based on Zernike moment. Optical Technique, 38, 729(2012).

    [14] Boxiong WANG, Chunyu YANG, Wei LI et al. Algorithm for sub-pixel line width measurement based on the orthogonal Legendre moment. Journal of Tsinghua University(Science and Technology), 56, 218-222(2016).

    [15] Guitang WANG, Xiangdong XUE, Liming WU. Study on the micro width measurement method for graphics wafer. Chinese Journal of Scientific Instrument, 27, 1138-1140(2006).

    [16] Zhishan GAO, Qun YUAN, Yifeng SUN et al. Non-destructive test methods of microstructures by optical microscopy (invited). Acta Photonica Sinica, 51, 0851501(2022).

    [17] Yifeng SUN, Zhishan GAO, Xiaoxin FAN et al. Signal processing for height measurement of high-aspect-ratio structure based on low-coherence interferometry. Acta Photonica Sinica, 51, 0912001(2022).

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    Jianqiu MA, Zhishan GAO, Qun YUAN, Zhenyan GUO, Yifeng SUN, Lihua LEI, Lin ZHAO. Microscopy Measurement Method of Microstructure Linewidth Based on Translation Difference[J]. Acta Photonica Sinica, 2023, 52(2): 0212001

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Oct. 27, 2022

    Accepted: Dec. 14, 2022

    Published Online: Mar. 28, 2023

    The Author Email: GAO Zhishan (zhishgao@njust.edu.cn)

    DOI:10.3788/gzxb20235202.0212001

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