Fig. 1. Step-edge imaging light intensity distribution

Fig. 2. One-step translation difference method

Fig. 3. Gradient distribution of PSF

Fig. 4. Effect of translation distance on differential sensitivity

Fig. 5. Influence of unstable illumination on differential pulses

Fig. 6. Two-step translation difference method

Fig. 7. Microscopic direct imaging experimental system

Fig. 8. Standard template design

Fig. 9. Microscopic images of the samples

Fig. 10. Differential data

Fig. 11. Measurement repeatability data