Opto-Electronic Engineering, Volume. 42, Issue 6, 50(2015)
Designing for Flexure-based X-Y Adjusting Mechanism of Lithograph Projection Objective
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CHEN Huanan, GUO Kang, ZHANG Linghua, LIU Jian, SHANG Hongbo. Designing for Flexure-based X-Y Adjusting Mechanism of Lithograph Projection Objective[J]. Opto-Electronic Engineering, 2015, 42(6): 50
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Received: Jun. 16, 2014
Accepted: --
Published Online: Jul. 10, 2015
The Author Email: Huanan CHEN (chennyhit@163.com)
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