Spectroscopy and Spectral Analysis, Volume. 29, Issue 6, 1713(2009)

A Micro-Silicon Multi-Slit Spectrophotometer Based on MEMS Technology

HAO Peng1...2,*, WU Yi-hui1, ZHANG Ping1, LIU Yong-shun1, ZHANG Ke1,2 and LI Hai-wen1 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
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    References(4)

    [9] [9] Owen A J. The Feature of Diode Array Technology in UV/Vis Spectrophotometer, Hong Kong, 1998. 15.

    [12] [12] Chrisp M P. App. Opt., 1983, 22(10): 1508.

    [13] [13] Chrisp M P. App. Opt., 1983, 22(10): 1519.

    [14] [14] Espinosa-Mansilla A, Salinas F, del Olmo M, et al. Applied Spectroscopy, 1996, 50(4): 449.

    CLP Journals

    [1] Xu Yingchao, Wang Qingna, Lin Hongyi, Zhu Wenzhang. Research Progress on Arrayed Waveguide Grating Chip for Micro Raman Spectrometer[J]. Laser & Optoelectronics Progress, 2015, 52(5): 50002

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    HAO Peng, WU Yi-hui, ZHANG Ping, LIU Yong-shun, ZHANG Ke, LI Hai-wen. A Micro-Silicon Multi-Slit Spectrophotometer Based on MEMS Technology[J]. Spectroscopy and Spectral Analysis, 2009, 29(6): 1713

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    Paper Information

    Received: Feb. 6, 2008

    Accepted: --

    Published Online: May. 26, 2010

    The Author Email: Peng HAO (hp312@126.com)

    DOI:

    CSTR:32186.14.

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