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Spectroscopy and Spectral Analysis, Volume. 29, Issue 6, 1713(2009)

A Micro-Silicon Multi-Slit Spectrophotometer Based on MEMS Technology

HAO Peng1...2,*, WU Yi-hui1, ZHANG Ping1, LIU Yong-shun1, ZHANG Ke1,2 and LI Hai-wen1 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
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    HAO Peng, WU Yi-hui, ZHANG Ping, LIU Yong-shun, ZHANG Ke, LI Hai-wen. A Micro-Silicon Multi-Slit Spectrophotometer Based on MEMS Technology[J]. Spectroscopy and Spectral Analysis, 2009, 29(6): 1713

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    Paper Information

    Received: Feb. 6, 2008

    Accepted: --

    Published Online: May. 26, 2010

    The Author Email: Peng HAO (hp312@126.com)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology