Spectroscopy and Spectral Analysis, Volume. 29, Issue 6, 1713(2009)

A Micro-Silicon Multi-Slit Spectrophotometer Based on MEMS Technology

HAO Peng1,2、*, WU Yi-hui1, ZHANG Ping1, LIU Yong-shun1, ZHANG Ke1,2, and LI Hai-wen1
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  • 1[in Chinese]
  • 2[in Chinese]
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    A new mini-spectrophotometer was developed by adopting micro-silicon slit and pixel segmentation technology, and this spectrophotometer used photoelectron diode array as the detector by the back-dividing-light way. At first, the effect of the spectral bandwidth on the tested absorbance linear correlation was analyzed. A theory for the design of spectrophotometer’s slit was brought forward after discussing the relationships between spectrophotometer spectrum band width and pre-and post-slits width. Then, the integrative micro-silicon-slit, which features small volume, high precision, and thin thickness, was manufactured based on the MEMS technology. Finally, a test was carried on linear absorbance solution by this spectrophotometer. The final result showed that the correlation coefficients were larger than 0.999, which means that the new mini-spectrophotometer with micro-silicon slit pixel segmentation has an obvious linear correlation.

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    HAO Peng, WU Yi-hui, ZHANG Ping, LIU Yong-shun, ZHANG Ke, LI Hai-wen. A Micro-Silicon Multi-Slit Spectrophotometer Based on MEMS Technology[J]. Spectroscopy and Spectral Analysis, 2009, 29(6): 1713

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    Paper Information

    Received: Feb. 6, 2008

    Accepted: --

    Published Online: May. 26, 2010

    The Author Email: Peng HAO (hp312@126.com)

    DOI:

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