Infrared and Laser Engineering, Volume. 53, Issue 3, 20230614(2024)
Method for measuring laser damage threshold of optical thin film elements based on quantitative damage evaluation
Fig. 3. Schematic diagram of the white-light interferometry system
Fig. 5. Laser damage degree of window plate under different fluence
Fig. 6. 3D measurement results of damage model. (a) Simulation damage model; (b) Three-dimensional measurement result; (c) Residual
Fig. 8. Analysis of simulation results. (a) Spatial distribution of deviation; (b) Deviation histograms; (c) Cross-sectional comparison
Fig. 9. Experimental measurement system. (a) Laser damage monitoring system; (b) White-light interferometry measurement system
Fig. 10. Laser damage threshold measurement results of cavity mirrors. (a) QELDD method; (b) S-on-1 method
Fig. 11. Laser damage threshold measurement results of windows. (a) QELDD method; (b) S-on-1 method
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Lei Xin, Zhongming Yang, Jun Meng, Zhaojun Liu. Method for measuring laser damage threshold of optical thin film elements based on quantitative damage evaluation[J]. Infrared and Laser Engineering, 2024, 53(3): 20230614
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Received: Nov. 6, 2023
Accepted: --
Published Online: Jun. 21, 2024
The Author Email: Yang Zhongming (zhongming.yang@sdu.edu.cn)