Laser & Optoelectronics Progress, Volume. 50, Issue 10, 101101(2013)
Design of V-Flexure Axial Adjusting Mechanism of Lithograph Projection Objective
[5] [5] Guo Kang, Gong Yan, Ni Mingyang, et al.. Design of a monolithic apparatus for the fine axial adjusting mechanism of optical element[J]. Acta Optica Sinica, 2012, 32(s1): s122002.
[6] [6] Zhao Lei, Gong Yan. Design and analysis for the high-precision lens support structure of objective lens for lithography[J]. Acta Optica Sinica, 2012, 32(9): 0922001.
[7] [7] Tian Wei, Wang Ping, Wang Rudong, et al.. Simulation and experimental research of 193 nm projection lithography lens supporting[J]. Chinese J Lasers, 2012, 39(8): 0816002.
[9] [9] Qiao Yupeng. The Machinability and Low-Stress Processing of Invar 36 Alloy[D]. Dalian: Dalian University of Technology, 2010. 2-8.
[10] [10] Qiao Yupeng, Kang Renke, Jin Zhuji. Selection of abrasives in precision grinding of Invar 36 alloy[J]. Diamond and Abrasives Engineering, 2009, (6): 8-14.
Get Citation
Copy Citation Text
Sun Zhen, Gong Yan. Design of V-Flexure Axial Adjusting Mechanism of Lithograph Projection Objective[J]. Laser & Optoelectronics Progress, 2013, 50(10): 101101
Category: Imaging Systems
Received: Jun. 13, 2013
Accepted: --
Published Online: Sep. 4, 2013
The Author Email: Zhen Sun (sunzhen176@163.com)