Laser & Optoelectronics Progress, Volume. 50, Issue 10, 101101(2013)
Design of V-Flexure Axial Adjusting Mechanism of Lithograph Projection Objective
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Sun Zhen, Gong Yan. Design of V-Flexure Axial Adjusting Mechanism of Lithograph Projection Objective[J]. Laser & Optoelectronics Progress, 2013, 50(10): 101101
Paper Information
Category: Imaging Systems
Received: Jun. 13, 2013
Accepted: --
Published Online: Sep. 4, 2013
The Author Email: Zhen Sun (sunzhen176@163.com)
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