Optics and Precision Engineering, Volume. 21, Issue 7, 1741(2013)
Principle and finite element analysis on UHV four-knife precision slit structure
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GAO Sa-sa, LU Qi-peng, PENG Zhong-qi, GONG Xue-peng. Principle and finite element analysis on UHV four-knife precision slit structure[J]. Optics and Precision Engineering, 2013, 21(7): 1741
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Received: Feb. 7, 2013
Accepted: --
Published Online: Aug. 5, 2013
The Author Email: Sa-sa GAO (gaosa8608@163.com)