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Optics and Precision Engineering, Volume. 21, Issue 7, 1741(2013)

Principle and finite element analysis on UHV four-knife precision slit structure

GAO Sa-sa1...2,*, LU Qi-peng1, PENG Zhong-qi1 and GONG Xue-peng1 |Show fewer author(s)
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    GAO Sa-sa, LU Qi-peng, PENG Zhong-qi, GONG Xue-peng. Principle and finite element analysis on UHV four-knife precision slit structure[J]. Optics and Precision Engineering, 2013, 21(7): 1741

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    Received: Feb. 7, 2013

    Accepted: --

    Published Online: Aug. 5, 2013

    The Author Email: Sa-sa GAO (gaosa8608@163.com)

    DOI:10.3788/ope.20132107.1741

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology