Fig. 1. Material structure of GAN-based Micro-LED sample

Fig. 2. Schematic diagram of femtosecond laser processing system

Fig. 3. Schematic diagram of two scan paths

Fig. 4. Squared diameters of ablated regions correlated with applied laser fluence

Fig. 5. Simulation results of vaporization temperature

Fig. 6. Simulation results of monopulse laser ablation

Fig. 7. Results of experimental and simulation ablated depth

Fig. 8. Comparison of surface topography of two scanning paths

Fig. 9. Surface morphology of chip ablated under different laser spot spacing

Fig. 10. Surface roughness of chip under different spacings

Fig. 11. Results of experimental and simulated ablative depth

Fig. 12. Three-dimensional morphology after removing chip