Optics and Precision Engineering, Volume. 32, Issue 9, 1360(2024)

Mechanism for laser-induced damage bad chip of Micro-LED and optimization of processing parameters

Jian QIAO1...3, Zhenduo WU1, Xinhan PENG2, Yuxuan RAN1 and Jingwei YANG1,* |Show fewer author(s)
Author Affiliations
  • 1Guangdong Provincial Key Laboratory of Industrial Intelligent Inspection Technology, Foshan University,Foshan528000,China
  • 2Shenzhen Hymson Laser Intelligent Equipments Co.,Ltd., Shenzhen518000, China
  • 3Ji Hua Laboratory, Foshan528200, China
  • show less

    To improve the manufacturing quality of Micro-LED display panels, it is crucial to perform in-situ removal and repair of defective chips. This study introduces a laser two-temperature ablation model developed with COMSOL to explore the mechanisms and process parameters for eliminating defective chips using a laser. Initially, the ablation threshold of the Micro-LED was identified by measuring the square diameter of the surface spot created by a single-pulse laser ablation. A fitting analysis was then carried out to determine the relationship between laser parameters and ablation depth, confirming the accuracy of the two-temperature ablation model. An extensive analysis was also conducted to examine the laser spot overlap rate, laser fluence, ablation characteristics, and removal mechanisms for different scanning paths on the affected chips. Utilizing the two-temperature ablation model, the laser scanning path and process parameters were optimized. The findings reveal that the femtosecond laser ablation model for Micro-LED has a maximum analytical error of 9.28%. The optimized laser removal method allows for rapid and precise removal at a rate of 1 s/chip, while ensuring high-quality repair of pad surfaces. This provides essential guidance for efficient repair processes in large-scale production environments of large-format Micro⁃LED display panels.

    Keywords
    Tools

    Get Citation

    Copy Citation Text

    Jian QIAO, Zhenduo WU, Xinhan PENG, Yuxuan RAN, Jingwei YANG. Mechanism for laser-induced damage bad chip of Micro-LED and optimization of processing parameters[J]. Optics and Precision Engineering, 2024, 32(9): 1360

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Feb. 2, 2024

    Accepted: --

    Published Online: Jun. 2, 2024

    The Author Email: YANG Jingwei (mejwyang@fosu.edu.cn)

    DOI:10.37188/OPE.20243209.1360

    Topics