Optics and Precision Engineering, Volume. 17, Issue 8, 192201927(2009)

Design and fabrication of DC to 30 GHz DC-contact shunt RF MEMS switch

HOU Zhi-hao*... LIU Ze-wen and LI Zhi-jian |Show fewer author(s)
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    References(9)

    [1] [1] HU G W,LIU Z W,HOU ZH H,et al..A dielectric-bridge-type MEMS series contact switch for 0-10GHz applications [C].8th International Conference on Solid-State and Integrated Circuit Technology.Shanghai,China,2006:542-544.

    [2] [2] BROWN E R.RF-MEMS switches for reconfigurable integrated circuits [J].IEEE Transactions on Microwave Theory and Techniques,1998,46(11):1968-1880.

    [3] [3] MACIEL J J,SLOCUM J F,SMITH J K,et al..MEMS electronically steerable antennas for fire control radars [C].Proceedings of IEEE 2007 Radar Conference.Waltham,MA,United States,2007:677-682.

    [4] [4] HU G W,LIU Z W,LI Z J,et al..Realization of a series contact MEMS switch with SiON dielectric bridge [J].Chinese Journal of Electronics,2008,17(2):215-218.

    [5] [5] TAN G L,REBEIZ G M.A dc-contact MEMS shunt switch [J].IEEE Microwave and Wireless Components Letters,2002,12(6):212-214.

    [6] [6] MERCIER D E,CHARVET P L,BERRUYER P,et al..A dc to 100 GHz high performance ohmic shunt switch [C].IEEE MTT-S International Microwave Symposium Digest.Fort Worth,TX,United States,2004:1931-1934.

    [8] [8] REBEIZ G M.RF MEMS,Theory,Design and Technology [M].New Jersey:John Wiley & Sons Ltd,2002.

    [9] [9] MULDAVIN J B,REBEIZ G M.High-isolation CPW MEMS shunt switches-part 1:modeling [J].IEEE Transactions on Microwave Theory and Techniques,2000,48(6):1045-1052

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    HOU Zhi-hao, LIU Ze-wen, LI Zhi-jian. Design and fabrication of DC to 30 GHz DC-contact shunt RF MEMS switch[J]. Optics and Precision Engineering, 2009, 17(8): 192201927

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    Paper Information

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    Received: Sep. 1, 2008

    Accepted: --

    Published Online: Oct. 28, 2009

    The Author Email: Zhi-hao HOU (houzh03@mails.tsinghua.edu.cn)

    DOI:

    CSTR:32186.14.

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