Optics and Precision Engineering, Volume. 17, Issue 8, 192201927(2009)
Design and fabrication of DC to 30 GHz DC-contact shunt RF MEMS switch
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HOU Zhi-hao, LIU Ze-wen, LI Zhi-jian. Design and fabrication of DC to 30 GHz DC-contact shunt RF MEMS switch[J]. Optics and Precision Engineering, 2009, 17(8): 192201927
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Received: Sep. 1, 2008
Accepted: --
Published Online: Oct. 28, 2009
The Author Email: Zhi-hao HOU (houzh03@mails.tsinghua.edu.cn)
CSTR:32186.14.
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