Acta Photonica Sinica, Volume. 51, Issue 6, 0623002(2022)

An Efficient Implementation Method of Arbitrary Gradient Doping and Its Application

Quanze LI1...2, Zunkai HUANG1,*, Li TIAN1, Yongxin ZHU1, Hui WANG1,* and Songlin FENG1 |Show fewer author(s)
Author Affiliations
  • 1Shanghai Advanced Research Institute Chinese Academy of Sciences,Shanghai 201210,China
  • 2University of Chinese Academy of Sciences,Beijing 100049,China
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    References(26)

    [2] S DANNY. A wafer scale active pixel CMOS image sensor for generic x-ray radiology, 259-267.

    [8] S DIMITRIJEV. Principles of semiconductor devices. Circuits & Devices Magazine IEEE, 22, 58-59(2011).

    [14] D STOPPA, L PANCHERI, N MASSARI et al. Time of flight image sensors in 0.18 μm CMOS technology: a comparative overview of different approaches(2011).

    [17] R MAHDI, J FINK, B J HOSTICKA. Lateral Drift-field photodetector for high speed 0.35 µm CMOS imaging sensors based on non-uniform lateral doping profile: design, theoretical concepts, and TCAD simulations(2010).

    [19] J E PARK, S PARK, K CHO et al. 7.9 1/2.74-inch 32Mpixel-prototype CMOS image sensor with 0.64 μm Unit pixels separated by full-depth deep-trench isolation, 64, 122-124(2021).

    [25] H F WOLF. Silicon semiconductor data(1969).

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    Quanze LI, Zunkai HUANG, Li TIAN, Yongxin ZHU, Hui WANG, Songlin FENG. An Efficient Implementation Method of Arbitrary Gradient Doping and Its Application[J]. Acta Photonica Sinica, 2022, 51(6): 0623002

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    Paper Information

    Category: Optical Device

    Received: Jan. 15, 2022

    Accepted: Mar. 23, 2022

    Published Online: Sep. 23, 2022

    The Author Email: HUANG Zunkai (huangzk@sari.ac.cn), WANG Hui (wanghui@sari.ac.cn)

    DOI:10.3788/gzxb20225106.0623002

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