Chinese Optics Letters, Volume. 15, Issue 7, 071402(2017)

Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp

Zhijun Yuan1,2, Haibo Zhang1,2, Ren Ye1,2, Jun Zhou1,2、*, Yunrong Wei1,2, and Qihong Lou1,2
Author Affiliations
  • 1Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2Shanghai Key Laboratory of All Solid-state Laser and Applied Techniques, Shanghai 201800, China
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    References(26)

    [2] L. Peter, T. Schroeder. Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp. U.S. patent(2003).

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    [9] L. Matsuoka, K. Ogawa, K. Yokoyama. Lasers Electro-Opt. Pacific Rim, 1011(2013).

    [12] K. Suzuki, B. W. Smith. Microlithography Science and Technology, 272(2007).

    [19] M. Blosser, X. L. Han, R. F. Garcia-Sanchez, P. Misra. Appl. Spectrosc. Sci. Nanomater., 2, 21(2015).

    [24] C. Li, L. Liu, X. Qiu, J. Wei, L. Deng, Y. Chen. Chin. Opt. Lett., 13, 013001(2015).

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    Zhijun Yuan, Haibo Zhang, Ren Ye, Jun Zhou, Yunrong Wei, Qihong Lou, "Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp," Chin.Opt.Lett. 15, 071402 (2017)

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    Paper Information

    Category: Lasers and Laser Optics

    Received: Dec. 5, 2016

    Accepted: Mar. 30, 2017

    Published Online: Jul. 20, 2018

    The Author Email: Jun Zhou (junzhousd@siom.ac.cn)

    DOI:10.3788/COL201715.071402

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