Researching | Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp

Chinese Optics Letters, Volume. 15, Issue 7, 071402(2017)

Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp

Zhijun Yuan^1,2, Haibo Zhang^1,2, Ren Ye^1,2, Jun Zhou^1,2、*, Yunrong Wei^1,2, and Qihong Lou^1,2

Author Affiliations

¹Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²Shanghai Key Laboratory of All Solid-state Laser and Applied Techniques, Shanghai 201800, China

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Zhijun Yuan, Haibo Zhang, Ren Ye, Jun Zhou, Yunrong Wei, Qihong Lou. Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp[J]. Chinese Optics Letters, 2017, 15(7): 071402

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Paper Information

Category: Lasers and Laser Optics

Received: Dec. 5, 2016

Accepted: Mar. 30, 2017

Published Online: Jul. 20, 2018

The Author Email: Jun Zhou (junzhousd@siom.ac.cn)

DOI:10.3788/COL201715.071402

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology