Optics and Precision Engineering, Volume. 32, Issue 9, 1320(2024)
Laser confocal interference surface rapid and high-precision automatic measurement
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Jiahao ZHAO, Shuai YANG, Zheng YANG, Jian CUI, Lirong QIU, Weiqian ZHAO. Laser confocal interference surface rapid and high-precision automatic measurement[J]. Optics and Precision Engineering, 2024, 32(9): 1320
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Received: Nov. 21, 2023
Accepted: --
Published Online: Jun. 2, 2024
The Author Email: YANG Shuai (yangshuai_bit@163.com)