Optics and Precision Engineering, Volume. 32, Issue 9, 1320(2024)
Laser confocal interference surface rapid and high-precision automatic measurement
Figures & Tables(9)
Fig. 1. Schematic diagram of automatic measurement of surface shapes using laser confocal interferometry
Fig. 4. Automatic measurement system for surface shapes based on confocal interferometry
Fig. 5. Zygo interferometer measurement results of standard sphere with curvature radius of 12.7 mm
Fig. 6. Comparison experiment of automatic and manual adjustment of interference fringes
Table 1. [in Chinese]
View tableView in ArticleTable 1. [in Chinese]
Fringe Wave aberration PV （λ） Tilted eccentricity Axial eccentricity 1 0.005 0.008 3 0.021 0.021 5 0.025 0.043 7 0.031 0.067
Table 2. Results of standard sphere interference surface with curvature radius of 12.7 mm
View tableView in ArticleTable 2. Results of standard sphere interference surface with curvature radius of 12.7 mm
Measurement
number
Automatic measurement Manual measurement 0 fringe PV（λ） 0 fringe PV（λ） 3 fringes PV（λ） 5 fringes PV（λ） 7 fringes PV（λ） 1 0.088 0.089 0.107 0.124 0.127 2 0.085 0.092 0.115 0.129 0.135 3 0.087 0.093 0.111 0.127 0.128 4 0.092 0.086 0.106 0.113 0.143 5 0.086 0.085 0.115 0.109 0.143 6 0.089 0.088 0.11 0.117 0.147 7 0.088 0.085 0.109 0.123 0.139 8 0.091 0.086 0.126 0.114 0.156 9 0.087 0.093 0.109 0.116 0.154 10 0.091 0.089 0.105 0.113 0.153 Mean value 0.088 4 0.088 6 0.111 3 0.118 5 0.142 5 Difference 0.000 6 0.000 8 0.023 5 0.030 7 0.054 7 Time/s 16.5 42.3 27.5 10.7 6.9
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Jiahao ZHAO, Shuai YANG, Zheng YANG, Jian CUI, Lirong QIU, Weiqian ZHAO. Laser confocal interference surface rapid and high-precision automatic measurement[J]. Optics and Precision Engineering, 2024, 32(9): 1320
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Received: Nov. 21, 2023
Accepted: --
Published Online: Jun. 2, 2024
The Author Email: YANG Shuai (yangshuai_bit@163.com)
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