Optics and Precision Engineering, Volume. 32, Issue 9, 1320(2024)

Laser confocal interference surface rapid and high-precision automatic measurement

Jiahao ZHAO... Shuai YANG*, Zheng YANG, Jian CUI, Lirong QIU and Weiqian ZHAO |Show fewer author(s)
Author Affiliations
  • MIIT Key Laboratory of Complex-field Intelligent Exploration, School of Optics and Photonics, Beijing Institute of Technology, Beijing100081, China
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    Considering the low accuracy and slow speed of measuring objects with spherical surfaces using traditional interferometry due to manual adjustments, an automatic laser confocal interferometric method is proposed for rapid and high-precision measurement of surface shapes. This method utilizes precise confocal fixed-focus technology for accurate confocal axial positioning of the object. The object's posture is adjusted using a five-dimensional workbench. Zernike fitting is employed to minimize defocus and tilt errors, achieving zero-order fringe adjustment and automatic determination of the surface shape. A laser confocal interferometric measurement system was developed for this purpose. Experimental results show that the difference between the automatic interference measurement results and those of the Zygo interferometer is 0.000 6λ, with a repeatability accuracy of 0.001 9λ. The average measurement time for a single surface is 16.5 s, improving measurement efficiency by 1.56 times compared to manual adjustments. This method offers an effective solution for the rapid and precise measurement of interferometric surface shapes.

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    Jiahao ZHAO, Shuai YANG, Zheng YANG, Jian CUI, Lirong QIU, Weiqian ZHAO. Laser confocal interference surface rapid and high-precision automatic measurement[J]. Optics and Precision Engineering, 2024, 32(9): 1320

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    Paper Information

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    Received: Nov. 21, 2023

    Accepted: --

    Published Online: Jun. 2, 2024

    The Author Email: YANG Shuai (yangshuai_bit@163.com)

    DOI:10.37188/OPE.20243209.1320

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