Infrared and Laser Engineering, Volume. 49, Issue 6, 20190472(2020)
Compact multi-measurement mode interferometer for on-machine testing
[3] Yu Zhang, Chunshui Jin, Dongmei Ma. Key technology for fiber phase-shifting point diffraction interferometer. Infrared and Laser Engineering, 44, 254-259(2015).
[8] [8] Oh C J, Lowman A E, Smith G A, et al. Fabrication testing of 4.2 m offaxis aspheric primary mirr of daniel K inouye solar telescope[C] SPIE ,2016, 9912: 99120O.
[10] Zhidong Gong, Daodang Wang, Chao Wang. Misalignment calibration in reverse Hartmann surface test based on Zernike polynomials. Chinese Journal of Scientific Instrument, 39, 178-184(2018).
[11] X Tian, Y Zhang, A Sohn. Dual-mode snapshot interferometric system for on-machine metrology. Optical Engineering, 58, 044104(2019).
[12] [12] Millerd J, Brock N, Hayes J, et al. Pixelated phasemask dynamic interferometer[C]SPIE, 2004, 5531: 304314.
[15] Yongmo Zhuo, Tianping Li. The two-wavelength digital wavefront interferometry and the method for the error-reduction. Journal of Zhejiang University (Natural Science), 4, 499-508(1989).
Get Citation
Copy Citation Text
Wang Daodang, Xiang Chao, Zhu Qixing, Kong Ming, Xu Xinke. Compact multi-measurement mode interferometer for on-machine testing[J]. Infrared and Laser Engineering, 2020, 49(6): 20190472
Category: Photoelectric measurement
Received: Feb. 3, 2020
Accepted: Mar. 20, 2020
Published Online: Sep. 21, 2020
The Author Email: Daodang Wang (wangdaodang@sina.com)