Fig. 1. System layout for compact multi-measurement mode interferometer

Fig. 2. Wavefront measurement error introduced by quarter-wave plate

Fig. 3. Error of field of view in polarization camera

Fig. 4. Photo of system device

Fig. 5. Measurement results of surface

Fig. 6. Measurement results of surface roughness

Fig. 7. Measurement results about surface figure with multi-wavelength method