Optics and Precision Engineering, Volume. 19, Issue 12, 2935(2011)

Microfabrication of SU-8 cantilever micro-force sensor integrated by copper piezoresistance

CHU Jin-kui*... CHEN Zhao-peng and ZHANG Ran |Show fewer author(s)
Author Affiliations
  • [in Chinese]
  • show less
    References(11)

    [1] [1] CHUDUC T, CREEMER J F, SARRO P M. Lateral nano-Newton force-sensing piezoresistive cantilever for microparticle handling[J]. J. Micromech. Microeng, 2006, 16:102-106.

    [2] [2] VOSKERICIAN G, SHIVE M S, SHAWGO R S, et al.. Biocompatibility and biofouling of MEMS drug delivery devices[J]. Biomaterials, 2003, 24:1959-1967.

    [5] [5] GENOLET G, BRUGGER J, DESPONT M, et al.. Soft, entirely photoplastic probes for scanning force microscopy[J]. Review of Scientific Instruments, 1999, 70(5):2398-2401.

    [6] [6] THAYSEN J, YALCINKAYA A D, VESTERGAARD R K, et al.. SU-8 based piezoresistive mechanical sensor[C]. The Fifteenth IEEE International Conference, 2002:320-323.

    [7] [7] CALLEJA M, RASMUSSEN P, JOHANSSON A, et al.. Polymeric mechanical sensors with integrated readout in a microfluidic system[J]. SPIE, 2003, 5116:314-321.

    [8] [8] DOLL J C, NAHID H, KLEJWA N, et al.. SU-8 force sensing pillar arrays for biological measurements[J]. Lab Chip, 2009, 9(10):1449-1462.

    [9] [9] RASMUSSEN P A, THAYSEN J, BOUWSTRA S, et al.. Modular design of AFM probe with sputtered silicon tip[J]. Sensors and Actuators A, 2001, 92:96-101.

    [10] [10] WOUTERS K, PUERS R. Determining the Young’s modulus and creep effects in three different photo definable epoxies for MEMS applications[J]. Sensors and Actuators A, 2009, 156:196-200.

    [11] [11] THAYSEN J, YALCINKAYA A D, VETTIGER P, et al.. Polymer-based stress sensor with integrated readout[J]. Journal of Physics D, 2002, 35:2698-2703.

    CLP Journals

    [1] LI Yong, LI Wen-ping, ZHU Xiao-gu. Design and fabrication of flexible MEMS anti-drag skin[J]. Optics and Precision Engineering, 2012, 20(12): 2696

    [2] CHU Jin-kui, LI Shuang-liang, ZHANG Ran. Micro-measurement of SU-8 photoelastic performance[J]. Optics and Precision Engineering, 2016, 24(3): 547

    Tools

    Get Citation

    Copy Citation Text

    CHU Jin-kui, CHEN Zhao-peng, ZHANG Ran. Microfabrication of SU-8 cantilever micro-force sensor integrated by copper piezoresistance[J]. Optics and Precision Engineering, 2011, 19(12): 2935

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: May. 23, 2011

    Accepted: --

    Published Online: Dec. 22, 2011

    The Author Email: Jin-kui CHU (chujk@dlut.edu.cn)

    DOI:10.3788/ope.20111912.2935

    Topics