Optics and Precision Engineering, Volume. 19, Issue 12, 2935(2011)
Microfabrication of SU-8 cantilever micro-force sensor integrated by copper piezoresistance
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CHU Jin-kui, CHEN Zhao-peng, ZHANG Ran. Microfabrication of SU-8 cantilever micro-force sensor integrated by copper piezoresistance[J]. Optics and Precision Engineering, 2011, 19(12): 2935
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Received: May. 23, 2011
Accepted: --
Published Online: Dec. 22, 2011
The Author Email: Jin-kui CHU (chujk@dlut.edu.cn)