Optics and Precision Engineering, Volume. 19, Issue 12, 2935(2011)

Microfabrication of SU-8 cantilever micro-force sensor integrated by copper piezoresistance

CHU Jin-kui*... CHEN Zhao-peng and ZHANG Ran |Show fewer author(s)
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    CHU Jin-kui, CHEN Zhao-peng, ZHANG Ran. Microfabrication of SU-8 cantilever micro-force sensor integrated by copper piezoresistance[J]. Optics and Precision Engineering, 2011, 19(12): 2935

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    Received: May. 23, 2011

    Accepted: --

    Published Online: Dec. 22, 2011

    The Author Email: Jin-kui CHU (chujk@dlut.edu.cn)

    DOI:10.3788/ope.20111912.2935

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