Optics and Precision Engineering, Volume. 19, Issue 12, 2935(2011)
Microfabrication of SU-8 cantilever micro-force sensor integrated by copper piezoresistance
As the SU-8 cantilever integrated by a metal piezoresistance can achieve a very high force sensitive coefficient due to its low elastic modulus, this paper designs a new type of SU-8 cantilever micro-force sensor integrated by a serpent-shaped copper piezoresistive structure and fabricates a prototype with a double-layer cantilever by a novel processing method. It introduces the design principles and fabrication method for the micro-force sensors and measures its technological parameters.Experimental results show that the SU-8 micro-force sensor has good linearity range in 0-350 μN and its force sensitivity is 0.24 mV/μN and measuring error is 4.06%. It can implement the micro-force detection and has advantages of simpler production process and shorter cycle as compared with a silicon micro-force sensor. Moreover, the force sensor has potential application in biomedical research for the SU-8 with prominent biological compatibility.
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CHU Jin-kui, CHEN Zhao-peng, ZHANG Ran. Microfabrication of SU-8 cantilever micro-force sensor integrated by copper piezoresistance[J]. Optics and Precision Engineering, 2011, 19(12): 2935
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Received: May. 23, 2011
Accepted: --
Published Online: Dec. 22, 2011
The Author Email: Jin-kui CHU (chujk@dlut.edu.cn)