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INFRARED, Volume. 42, Issue 12, 1(2021)

ALD Deposition and Energy Dispersive Spectrum Analysis of Al2O3/HfO2 Composite Films on GaAs Substrates with Different Aspect Ratios

Reng WANG1...2,*, Guo-qing XU1,2, Kai-hui CHU1,2, Ning LI1,2, and Xiang-yang LI12 |Show fewer author(s)
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    WANG Reng, XU Guo-qing, CHU Kai-hui, LI Ning, LI Xiang-yang. ALD Deposition and Energy Dispersive Spectrum Analysis of Al2O3/HfO2 Composite Films on GaAs Substrates with Different Aspect Ratios[J]. INFRARED, 2021, 42(12): 1

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    Received: Jul. 19, 2021

    Accepted: --

    Published Online: Jan. 10, 2022

    The Author Email: Reng WANG (rwang@mail.sitp.ac.cn)

    DOI:10.3969/j.issn.1672-8785.2021.12.001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology