Acta Optica Sinica, Volume. 30, Issue 10, 2782(2010)
Study on Characteristics and Structures of Amorphous Silicon Nitride Thin Films Applied in Micro-Bolometer
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Zhou Dong, Xu Xiangdong, Wang Zhi, Wang Xiaomei, Jiang Yadong. Study on Characteristics and Structures of Amorphous Silicon Nitride Thin Films Applied in Micro-Bolometer[J]. Acta Optica Sinica, 2010, 30(10): 2782
Paper Information
Category: Physical Optics
Received: Jun. 12, 2010
Accepted: --
Published Online: Oct. 24, 2012
The Author Email: Dong Zhou (zduestc@163.com)
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