Optics and Precision Engineering, Volume. 31, Issue 3, 301(2023)
Measurement of through silicon via by near-infrared micro interferometry based on aberration compensation
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Chunxia WU, Jianqiu MA, Zhishan GAO, Zhenyan GUO, Qun YUAN. Measurement of through silicon via by near-infrared micro interferometry based on aberration compensation[J]. Optics and Precision Engineering, 2023, 31(3): 301
Category: Modern Applied Optics
Received: Sep. 8, 2022
Accepted: --
Published Online: Mar. 7, 2023
The Author Email: GUO Zhenyan (guozy15@njust.edu.cn)