Fig. 1. Optical path of Linnik near-infrared reflective micro interferometry system

Fig. 2. Modeling of TSV array hole with diameter of 10 μm and depth of 65 μm

Fig. 3. Electric field transmission diagram of probe light focused on points A and B

Fig. 4. Wavefront phase of points A and B

Fig. 5. Zernike polynomial fitting coefficients of aberration of points A and B

Fig. 6. Linnik near-infrared micro interferometry system

Fig. 7. Interferogram of top and bottom before aberration compensation

Fig. 8. Image evaluation function with 20 iterations of compensation

Fig. 9. Bottom image at 12 times of iterative compensation

Fig. 10. Interferograms of top and bottom after aberration compensation

Fig. 11. Interference signal intensity at one point on bottom before aberration compensation

Fig. 12. Interference signal intensity at one point on bottom surface after aberration compensation

Fig. 13. Results of TSV measurement by different methods

Fig. 14. Top and bottom interference patterns of 3.85∶1 aspect-ratio TSV with two methods

Fig. 15. Results of TSV with aspect ratio of 10.3∶1 by near-infrared micro interferometry based on aberration compensation