Optics and Precision Engineering, Volume. 24, Issue 4, 804(2016)

Flexure-based XY micro-positioning stage with large stroke and coupling compensation

YAN Peng1...2,*, ZHANG Li-long1 and LIU Peng-bo1 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
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    References(14)

    [1] [1] BONNAIL N, TONNEAU D, JANDARD F, et al.. Variable structure control of a piezoelectric actuator for a scanning tunneling microscope [J]. IEEE Trans. Ind. Electron, 2004, 51 (2): 354-363.

    [2] [2] ZHAO J, WANG H, GAO R, et al.. A novel alignment mechanism employing orthogonal connected multi-layered flexible hinges for both leveling and centering [J]. Rev. Sci. Instrum, 2012, 83 (6): 065102-1-065102-7.

    [3] [3] LIU P, YAN P, ZHANG Z. Design and analysis of an x-y parallel nanopositioner supporting large-stroke servomechanism [J].Proceedings of the Institution of Mechanical Engineers Part C Journal of Mechanical Engineering Science, 2015, 229(2): 364-376.

    [4] [4] ZHANG Y, TAN K, HUANG S. Vision-servo system for automated cell injection [J]. IEEE Trans. Ind. Electron., 2009, 56 (1): 231-238.

    [5] [5] ZHAO L, GONG Y, ZHAO Y. Flexure-based X-Y micro-motion mechanism used in lithographic lens [J]. Opt. Precision Eng., 2013, 21(6): 1426-1433. (in Chinese)

    [8] [8] LI Y, XU Q. A novel piezoactuated XY stage with parallel, decoupled, and stacked flexure structure for micro-/nanopositioning [J]. IEEE Trans. Ind. Electron., 2011, 58 (8): 3601-3615.

    [9] [9] YU J J, PEI X, BI SH SH, et al.. State-of-arts of Design Method for Flexure Mechanisms [J]. Journal of Mechanical Engineering, 2010, 46(13): 2-12. (in Chinese)

    [10] [10] AWTAR S, SLOCUM A H. Constraint-based design of parallel kinematic XY flexure mechanisms [J]. J. Mech. Des., 2007, 129(8): 816-830.

    [11] [11] AWTAR S, PARMAR G. Design of a large range XY nanopositioning system [J]. Journal of Mechanisms and Robotics, 2013, 5(2): 021008.

    [12] [12] XU Q.Design, testing and precision control of a novel long-stroke flexure micropositioning system [J]. Mechanism and Machine Theory, 2013, 70: 209-224.

    [13] [13] XU Q. Design and development of a compact flexure-based XY precision positioning system with centimeter range [J]. IEEE Trans. Ind. Electron., 2014, 61 (2): 893-902.

    [14] [14] XU Q. New flexure parallel-kinematic micropositioning system with arge workspace [J]. IEEE Trans. Robot., 2012, 28 (2): 478-491.

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    [1] DU Chen-hui, GONG Liang, CAI Xiao-yong, YIN Bo-hua, JIANG Chao, AN Li-bao. Micro-nanometer scale vibration in imaging of metrological scanning electron microscope[J]. Optics and Precision Engineering, 2019, 27(4): 860

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    YAN Peng, ZHANG Li-long, LIU Peng-bo. Flexure-based XY micro-positioning stage with large stroke and coupling compensation[J]. Optics and Precision Engineering, 2016, 24(4): 804

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    Paper Information

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    Received: Nov. 20, 2015

    Accepted: --

    Published Online: Jun. 6, 2016

    The Author Email: Peng YAN (pengyan2007@gmail.com)

    DOI:10.3788/ope.20162404.0804

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