Optics and Precision Engineering, Volume. 24, Issue 4, 804(2016)
Flexure-based XY micro-positioning stage with large stroke and coupling compensation
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YAN Peng, ZHANG Li-long, LIU Peng-bo. Flexure-based XY micro-positioning stage with large stroke and coupling compensation[J]. Optics and Precision Engineering, 2016, 24(4): 804
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Received: Nov. 20, 2015
Accepted: --
Published Online: Jun. 6, 2016
The Author Email: Peng YAN (pengyan2007@gmail.com)