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Optics and Precision Engineering, Volume. 24, Issue 4, 804(2016)

Flexure-based XY micro-positioning stage with large stroke and coupling compensation

YAN Peng1...2,*, ZHANG Li-long1 and LIU Peng-bo1 |Show fewer author(s)
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    YAN Peng, ZHANG Li-long, LIU Peng-bo. Flexure-based XY micro-positioning stage with large stroke and coupling compensation[J]. Optics and Precision Engineering, 2016, 24(4): 804

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    Received: Nov. 20, 2015

    Accepted: --

    Published Online: Jun. 6, 2016

    The Author Email: Peng YAN (pengyan2007@gmail.com)

    DOI:10.3788/ope.20162404.0804

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology