Optics and Precision Engineering, Volume. 24, Issue 4, 804(2016)
Flexure-based XY micro-positioning stage with large stroke and coupling compensation
A two-dimensional parallel micro-displacement stage was designed based on double compound parallelogram flexures to solve the shortcomings of the stage in smaller motion strokes, larger coupling errors, and the motion performance sensitive to manufacturing errors. The designed micro-displacement stage was driven by two voice coil motors in each direction, the coupling motion errors caused by manufacturing errors were compensated by tuning the ratio of the signals imposed on the two drivers and the motion decouplings for X direction and Y direction was implemented. By which, the dependence of the system on manufacturing errors was reduced. On the basis of the Castigliano's second theorem, a model of stage mechanism was established to optimize the size parameters of the stage, and the performance of the designed stage was verified by finite element analysis. Finally, an experimental platform for the micro-displacement position was established. The experimental results demonstrate that the designed stage has a bigger stage stroke, a bigger area ratio (workspace size to planar dimension of the stage ), higher position accuracy, and excellent decoupling performance. It shows a large motion range of ±2.25 mm×±2.27 mm, an area ratio of 1.73%, and the coupling error of less than 0.27%.
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YAN Peng, ZHANG Li-long, LIU Peng-bo. Flexure-based XY micro-positioning stage with large stroke and coupling compensation[J]. Optics and Precision Engineering, 2016, 24(4): 804
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Received: Nov. 20, 2015
Accepted: --
Published Online: Jun. 6, 2016
The Author Email: Peng YAN (pengyan2007@gmail.com)