Optics and Precision Engineering, Volume. 24, Issue 4, 804(2016)

Flexure-based XY micro-positioning stage with large stroke and coupling compensation

YAN Peng1...2,*, ZHANG Li-long1 and LIU Peng-bo1 |Show fewer author(s)
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less

    A two-dimensional parallel micro-displacement stage was designed based on double compound parallelogram flexures to solve the shortcomings of the stage in smaller motion strokes, larger coupling errors, and the motion performance sensitive to manufacturing errors. The designed micro-displacement stage was driven by two voice coil motors in each direction, the coupling motion errors caused by manufacturing errors were compensated by tuning the ratio of the signals imposed on the two drivers and the motion decouplings for X direction and Y direction was implemented. By which, the dependence of the system on manufacturing errors was reduced. On the basis of the Castigliano's second theorem, a model of stage mechanism was established to optimize the size parameters of the stage, and the performance of the designed stage was verified by finite element analysis. Finally, an experimental platform for the micro-displacement position was established. The experimental results demonstrate that the designed stage has a bigger stage stroke, a bigger area ratio (workspace size to planar dimension of the stage ), higher position accuracy, and excellent decoupling performance. It shows a large motion range of ±2.25 mm×±2.27 mm, an area ratio of 1.73%, and the coupling error of less than 0.27%.

    Tools

    Get Citation

    Copy Citation Text

    YAN Peng, ZHANG Li-long, LIU Peng-bo. Flexure-based XY micro-positioning stage with large stroke and coupling compensation[J]. Optics and Precision Engineering, 2016, 24(4): 804

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Nov. 20, 2015

    Accepted: --

    Published Online: Jun. 6, 2016

    The Author Email: Peng YAN (pengyan2007@gmail.com)

    DOI:10.3788/ope.20162404.0804

    Topics