Optics and Precision Engineering, Volume. 18, Issue 5, 1166(2010)
Design and thermal analysis of high performance MEMS capacitive pressure sensor
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LV Hao-jie, HU Guo-qing, ZOU Wei, WU Can-yun, CHEN Yu-feng. Design and thermal analysis of high performance MEMS capacitive pressure sensor[J]. Optics and Precision Engineering, 2010, 18(5): 1166
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Received: Sep. 30, 2009
Accepted: --
Published Online: Aug. 31, 2010
The Author Email: Hao-jie LV (hoiselv@yahoo.com.cn)
CSTR:32186.14.
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