Optical Instruments, Volume. 42, Issue 2, 57(2020)

Molecular dynamics simulation of AFM scratching on silicon with varying load

Yan MA and Jun PENG
Author Affiliations
  • School of Physics Science and Engineering, Tongji University, Shanghai 200092, China
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    References(10)

    [6] [6] BELAK J, STOWERS I F. A molecular dynamics model of the thogonal cutting process[C]Proceeding of the ASPE annual conference. Rochester, New Yk, 1990: 23 28.

    [10] FANG F Z, WU H, ZHOU W. A study on mechanism of nano-cutting single crystal silicon[J]. Journal of Materials Processing Technology, 184, 407-410(2007).

    [13] [13] SHEN T M, TUNG Y T, CHENG Y Y, et al. Molecular Dynamic simulation study of stress memization in Si dislocations[C]Proceedings of 2012 international electron devices meeting. Francisco: IEEE, 2012: 30.1.1 30.1.4.

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    Yan MA, Jun PENG. Molecular dynamics simulation of AFM scratching on silicon with varying load[J]. Optical Instruments, 2020, 42(2): 57

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    Paper Information

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    Received: Jun. 19, 2019

    Accepted: --

    Published Online: May. 27, 2020

    The Author Email:

    DOI:10.3969/j.issn.1005-5630.2020.02.010

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