Optical Instruments, Volume. 42, Issue 2, 57(2020)
Molecular dynamics simulation of AFM scratching on silicon with varying load
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Yan MA, Jun PENG. Molecular dynamics simulation of AFM scratching on silicon with varying load[J]. Optical Instruments, 2020, 42(2): 57
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Received: Jun. 19, 2019
Accepted: --
Published Online: May. 27, 2020
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