Fig. 1. The model of AFM scratching

Fig. 2. The model of AFM probe

Fig. 3. A schematic diagram of the pile distribution

Fig. 4. The pile distribution on different scratching velocity

Fig. 5. The vertical view and lateral view piles distribution on different scratching velocity

Fig. 6. The pile distribution on different probe radius

Fig. 7. The vertical view and lateral view piles distribution on different probe radius

Fig. 8. The wears and tears of probe（r=1 nm）and the deform of probe（r=1.5 nm）

Fig. 9. The pile distribution on different probe wedge angles

Fig. 10. The vertical view and lateral view pile distribution on different probe wedge angles