Optics and Precision Engineering, Volume. 20, Issue 8, 1772(2012)

Driving characteristics of non-overlap vertical electrostatic combdriver for optical translational micromirror

ZHAI Lei-ying1...2,*, XU Jing1, ZHONG Shao-long2 and WU Ya-ming1 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
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    References(19)

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    ZHAI Lei-ying, XU Jing, ZHONG Shao-long, WU Ya-ming. Driving characteristics of non-overlap vertical electrostatic combdriver for optical translational micromirror[J]. Optics and Precision Engineering, 2012, 20(8): 1772

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    Paper Information

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    Received: Apr. 11, 2012

    Accepted: --

    Published Online: Sep. 4, 2012

    The Author Email: Lei-ying ZHAI (lyzhai@mail.sim.ac.cn)

    DOI:10.3788/ope.20122008.1772

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